IPA: /ˌɛpɪˈtæksɪəli/
KK: /ˌɛpɪˈtæksɪəli/
In a manner that relates to the growth of a crystalline layer on a substrate, where the layer follows the crystallographic orientation of the underlying material.
The semiconductor was deposited epitaxially to ensure optimal electronic properties.
Epitaxially → It is formed from "epi-" (meaning upon or over) and "taxis" (from Greek "taxis", meaning arrangement or order). The word describes a process where a layer of material is deposited upon a crystalline substrate in a specific arrangement.
Think of 'epi-' meaning 'upon' and 'taxis' meaning 'arrangement' — this helps you remember that 'epitaxially' refers to a process involving the arrangement of material upon another surface.